● 超纯的臭氧气体：极低的金属杂质含量，低至ppt级别；

● Ultra clean Ozone gas: Extremely low level metal contaminations, low to ppt level;

● 高可靠性与重复性；

● High reliability and Excellent repeatability;

● 双面放电双面冷却技术，提高放电效率；

● Double side discharging and cooling technology，improve discharging efficiency;

● 高臭氧气体浓度，可达350g/m3以上；

● High ozone concentration, ≥350g/m3;

● 高气体流通压力，可达3bar以上；

● High delivery Ozone pressure; up to 3 bar;

● 流量可达36slm以上，适合于最新的CVD系统；

● High flow up to 36slm, applied to newest CVD system;